Measuring the thickness of thin films
A flexible system for the in-process, full-width thickness measurement of thin films and the quality control of thin coatings.
We would like to better understand how our solution might serve your thin film thickness measurement or coating inspection requirements. Please get in touch if you would like to discuss.
Background
The contribution of solar power to global energy generation is expected to grow to 22% by 2050. This growth is driving technological innovations in the solar cell industry, including those relating to thin film semiconductors. However, better solutions are needed for the in-line inspection of such thin films during manufacturing to address current challenges relating to scalability, flexibility and cost.
Solar power is just one example of a sector that has a requirement for the measurement or inspection of thin films or coatings. There are many similar applications across a wide range of sectors including aerospace, automotive, electronics, energy, food, medical and optics/lighting.
Solution
Our innovative modular reflectometer concept can be used to create an array of sensors for the full-width inspection of thin films without the need for external light sources or spectrometers.
| Capability | Verified Performance | Likely Potential Capability |
|---|---|---|
| Film thickness | 100 - 500 nm | Up to 5 碌m |
| Thickness measurement error | < 2% | < 1% |
| Coating material | SiO2 | Oxides, dielectrics, conductive polymers, semi-transparent |
| Number of coating layers | 2 | Up to 3 |
| Substrates | Si | Oxides, plastics, metals |
| Width coverage | 8 cm (5 sensors) | Unlimited (stacked) |
| Inspection speed | 0.1 - 13.8 m/min | 50 m/min |
| Angle variations | +/- 0.5o | N/A |
| Inspection distance | 6 mm (2 mm ideal) | 10 mm |
| Environment | Atmospheric | + Vacuum |
Benefits
- Real-time in-process inspection.
- Superior scalability - the ability to 鈥渟tack鈥 multiple sensors for increased measurement/inspection width.
- Compact - occupies a smaller space envelope than competitive measurement solutions.
- Wireless potential - for 鈥淚nternet of Things鈥 integration.