@article{article, title = {{Quantum-interferometric optical lithography:鈥僒owards arbitrary two-dimensional patterns}}, publisher = {{American Physical Society (APS)}}, url = {{}}, year = {{2001}}, month = {{1}}, author = {{Kok P and Boto AN and Abrams DS and Williams CP and Braunstein SL and Dowling JP}}, doi = {{10.1103/physreva.63.063407}}, volume = {{63}}, journal = {{Physical Review A}}, issue = {{6}}, note = {{Accessed on 2025/04/11}}}