TY - JOUR T1 - Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials JO - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures PY - 2007/07/01 AU - Ho Y-LD AU - Gibson R AU - Hu CY AU - Cryan MJ AU - Rarity JG AU - Heard PJ AU - Timpson JA AU - Fox AM AU - Skolnick MS AU - Hopkinson M AU - Tahraoui A ED - DO - DOI: 10.1116/1.2749528 PB - American Vacuum Society VL - 25 IS - 4 SP - 1197 EP - 1197 Y2 - 2025/04/09 ER -