@article{article, title = {{Recent improvements in quantification of energy-dispersive X-ray spectra and maps in electron microscopy of semiconductors}}, url = {{}}, year = {{2024}}, month = {{1}}, author = {{Walther T}}, doi = {{10.1002/appl.202300128}}, volume = {{3}}, journal = {{Applied Research}}, issue = {{4-5}}, note = {{Accessed on 2025/05/04}}}