@article{article, title = {{Nanowear in scanning force microscopy: Information on deposits formed in and downstream of a hexane plasma}}, publisher = {{AIP Publishing}}, url = {{}}, year = {{2002}}, month = {{1}}, author = {{Dinelli F and Leggett GJ and Alexander MR}}, doi = {{10.1063/1.1446220}}, volume = {{91}}, journal = {{Journal of Applied Physics}}, issue = {{6}}, pages = {{3841-3846}}, note = {{Accessed on 2025/04/11}}}