@article{article, title = {{Sub-5 nm graphene nanopore fabrication by nitrogen ion etching induced by a low-energy electron beam}}, url = {{}}, year = {{2016}}, month = {{5}}, author = {{Fox DS and Maguire P and Zhou Y and Rodenburg C and O鈥橬eill A and Coleman JN and Zhang H}}, doi = {{10.1088/0957-4484/27/19/195302}}, volume = {{27}}, journal = {{Nanotechnology}}, issue = {{19}}, note = {{Accessed on 2025/05/04}}}