@article{article, title = {{Pb(Zr,Ti)O3 thin films on zirconium membranes for micromechanical applications}}, url = {{}}, year = {{1996}}, month = {{1}}, author = {{Maeder T and Muralt P and Sagalowicz L and Reaney I and Kohli M and Kholkin A and Setter N}}, doi = {{10.1063/1.116529}}, volume = {{68}}, journal = {{Applied Physics Letters}}, issue = {{6}}, pages = {{776-778}}, note = {{Accessed on 2025/05/05}}}