@article{article, title  = {{XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes}},

 url = {{}},

 year = {{2011}},

 month = {{1}},

 author = {{Guan W and Ghatak J and Peng N and Peng Y and Jeynes C and Möbus G}},

 doi = {{10.1557/opl.2012.757}},

 volume = {{1411}},

 journal = {{Materials Research Society Symposium Proceedings}},

 pages = {{49-54}},

 note = {{Accessed on 2025/04/18}}}