@inproceedings{inproceedings, title = {{Comparison of multilayered nanowire imaging by SEM and Helium Ion Microscopy}}, url = {{}}, year = {{2010}}, month = {{1}}, author = {{Inkson BJ and Liu X and Peng Y and Jepson MAE and Rodenburg C}}, doi = {{10.1088/1742-6596/241/1/012080}}, volume = {{241}}, journal = {{ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)}}, note = {{Accessed on 2025/05/04}}}